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On the electrical activity of extended defects in high-mobility channel materials

dc.contributor.authorSimoen, Eddy
dc.contributor.authorEneman, Geert
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorGupta, Somya
dc.contributor.authorMerckling, Clement
dc.contributor.authorAlian, AliReza
dc.contributor.authorSchulze, Andreas
dc.contributor.authorCaymax, Matty
dc.contributor.authorLanger, Robert
dc.contributor.authorBarla, Kathy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-22T22:54:45Z
dc.date.available2021-10-22T22:54:45Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25911
dc.sourceIIOimport
dc.titleOn the electrical activity of extended defects in high-mobility channel materials
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorAlian, AliReza
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorBarla, Kathy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage119
dc.source.endpage130
dc.source.conferenceULSI Process Integration 9
dc.source.conferencedate11/10/2015
dc.source.conferencelocationPhoenix, AZ USA
dc.identifier.urlhttp://ecst.ecsdl.org/content/69/10/119.short
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 69, Issue 10


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