dc.contributor.author | Singh, Arjun | |
dc.contributor.author | Chan, BT | |
dc.contributor.author | Gronheid, Roel | |
dc.date.accessioned | 2021-10-22T22:57:05Z | |
dc.date.available | 2021-10-22T22:57:05Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25916 | |
dc.source | IIOimport | |
dc.title | Roughness smoothing of BCP patterns with sequential infiltration synthesis | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Singh, Arjun | |
dc.contributor.imecauthor | Chan, BT | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
dc.source.peerreview | no | |
dc.source.conference | 1st International Symposium on DSA | |
dc.source.conferencedate | 25/10/2015 | |
dc.source.conferencelocation | Leuven Belgium | |
dc.identifier.url | http://www.dsasymposium.org/index.php/program/dsa-proceedings | |
imec.availability | Published - imec | |