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Roughness smoothing of BCP patterns with sequential infiltration synthesis

dc.contributor.authorSingh, Arjun
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-22T22:57:05Z
dc.date.available2021-10-22T22:57:05Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25916
dc.sourceIIOimport
dc.titleRoughness smoothing of BCP patterns with sequential infiltration synthesis
dc.typeOral presentation
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.conference1st International Symposium on DSA
dc.source.conferencedate25/10/2015
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://www.dsasymposium.org/index.php/program/dsa-proceedings
imec.availabilityPublished - imec


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