Authors

Spessot, Alessio; Ritzenthaler, Romain; Schram, Tom; Aoulaiche, Marc; Cho, Moon Ju; Toledano Luque, Maria; Fazan, Pierre

Conference

E-MRS Spring Meeting Symposuium AA: Non-Volatile Memories: Materials, Nanostructures and Integration Approaches

Title

Advanced doping techniques for DRAM peripheral MOSFETs

Publication type

Meeting abstract

Embargo date

9999-12-31