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Defectivity study on dry development rinse process (DDRP)

dc.contributor.authorStokes, Harold
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorThouroude, Yan
dc.contributor.authorD'Urzo, Lucia
dc.contributor.authorSayan, Safak
dc.contributor.authorFoubert, Philippe
dc.date.accessioned2021-10-22T23:10:26Z
dc.date.available2021-10-22T23:10:26Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25945
dc.sourceIIOimport
dc.titleDefectivity study on dry development rinse process (DDRP)
dc.typeProceedings paper
dc.contributor.imecauthorStokes, Harold
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorThouroude, Yan
dc.contributor.imecauthorD'Urzo, Lucia
dc.contributor.imecauthorFoubert, Philippe
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.source.peerreviewyes
dc.source.conferenceInternational Symposium on Extreme Ultraviolet Lithography - EUVL
dc.source.conferencedate5/10/2015
dc.source.conferencelocationMaastricht The Nederlands
imec.availabilityPublished - imec


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