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A novel structure of MOSFET array to measure Ioff-Ion with high accuracy and high density

dc.contributor.authorSuzuki, Tsuyoshi
dc.contributor.authorAnchlia, Ankur
dc.contributor.authorCherman, Vladimir
dc.contributor.authorOishi, Hidetoshi
dc.contributor.authorMori, Shigetaka
dc.contributor.authorRyckaert, Julien
dc.contributor.authorOgawa, Kazuhisa
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorBeyne, Eric
dc.contributor.authorFukuzaki, Yuzo
dc.contributor.authorVerkest, Diederik
dc.contributor.authorOhnuma, Hidetoshi
dc.date.accessioned2021-10-22T23:14:57Z
dc.date.available2021-10-22T23:14:57Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25954
dc.sourceIIOimport
dc.titleA novel structure of MOSFET array to measure Ioff-Ion with high accuracy and high density
dc.typeProceedings paper
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorOishi, Hidetoshi
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage9
dc.source.endpage13
dc.source.conferenceInternational Conference on Microelectronic Test Structures - ICMTS
dc.source.conferencedate23/03/2015
dc.source.conferencelocationTempe, AZ USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7106095
imec.availabilityPublished - open access


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