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Propagation of within-die nonuniformity in CMP

dc.contributor.authorGrillaert, Joost
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeylen, Nancy
dc.contributor.authorDevriendt, Katia
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-30T12:02:49Z
dc.date.available2021-09-30T12:02:49Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2596
dc.sourceIIOimport
dc.titlePropagation of within-die nonuniformity in CMP
dc.typeProceedings paper
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage571
dc.source.endpage575
dc.source.conferenceAdvanced Metallization and Interconnect Systems for ULSI Applications in 1997
dc.source.conferencedate30/09/1997
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Conference Proceedings; Vol. ULSI XII


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