Show simple item record

EUV scanner printability evaluation of natural blank defects detected by actinic blank inspection

dc.contributor.authorTakagi, Noriaki
dc.contributor.authorWatanabe, Hidehiro
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorJonckheere, Rik
dc.contributor.authorGallagher, Emily
dc.date.accessioned2021-10-22T23:24:26Z
dc.date.available2021-10-22T23:24:26Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25975
dc.sourceIIOimport
dc.titleEUV scanner printability evaluation of natural blank defects detected by actinic blank inspection
dc.typeOral presentation
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.source.peerreviewno
dc.source.conferenceWorkshop NGL - The Japan Society of Applied Physics
dc.source.conferencedate6/07/2015
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record