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Radiation hardness of electrical properties of n-channel UTBOX SOI by 2 MeV electron irradiation
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Authors
Takakura, Kenichiro
;
Goto, T.
;
Yoneoka, M.
;
Tsunoda, I.
;
Simoen, Eddy
;
Claeys, Cor
Conference
28th International Conference on Defects in Semiconductors - ICDS
Title
Radiation hardness of electrical properties of n-channel UTBOX SOI by 2 MeV electron irradiation
Publication type
Oral presentation
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