dc.contributor.author | Takakura, Kenichiro | |
dc.contributor.author | Mori, Masato | |
dc.contributor.author | Yoneoka, Masashi | |
dc.contributor.author | Tsunoda, Isao | |
dc.contributor.author | Nakashima, Toshiyuki | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Claeys, Cor | |
dc.date.accessioned | 2021-10-22T23:25:21Z | |
dc.date.available | 2021-10-22T23:25:21Z | |
dc.date.issued | 2015 | |
dc.identifier.issn | 1610-1634 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25977 | |
dc.source | IIOimport | |
dc.title | Thermal recovery process of electron irradiated Si1-xCx source/drain n-MOSFETs | |
dc.type | Journal article | |
dc.contributor.imecauthor | Takakura, Kenichiro | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1405 | |
dc.source.endpage | 1408 | |
dc.source.journal | Physica Status Solidi C | |
dc.source.issue | 12 | |
dc.source.volume | 12 | |
dc.identifier.url | http://onlinelibrary.wiley.com/doi/10.1002/pssc.201510088/abstract | |
imec.availability | Published - imec | |
imec.internalnotes | E-MRS Spring Meeting 2015 paper | |