Publication:

Modelling step height reduction and local removal rates based on pad-substrate interactions

Date

1998

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Grillaert, Joost

;

;

;

Devriendt, Katia

;

;

Statistics

2005 since deposited on 2021-09-30

Acq. date: 2026-04-06