Authors

Grillaert, Joost; Meuris, Marc; Heylen, Nancy; Devriendt, Katia; Vrancken, Evi; Heyns, Marc

Conference

Proceedings of the 3rd International Chemical-Mechanical-Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC);

Title

Modelling step height reduction and local removal rates based on pad-substrate interactions

Publication type

Proceedings paper