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Conference contributions
Modelling step height reduction and local removal rates based on pad-substrate interactions
Publication:
Modelling step height reduction and local removal rates based on pad-substrate interactions
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Date
1998
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Grillaert, Joost
;
Meuris, Marc
;
Heylen, Nancy
;
Devriendt, Katia
;
Vrancken, Evi
;
Heyns, Marc
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2000
since deposited on 2021-09-30
Acq. date: 2026-01-12
Citations
Metrics
Views
2000
since deposited on 2021-09-30
Acq. date: 2026-01-12
Citations