dc.contributor.author | Tang, Baojun | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Jourdain, Anne | |
dc.contributor.author | Boemmels, Juergen | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Wilcox, Eric | |
dc.contributor.author | McMullen, Timothy | |
dc.date.accessioned | 2021-10-22T23:26:43Z | |
dc.date.available | 2021-10-22T23:26:43Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25980 | |
dc.source | IIOimport | |
dc.title | Constant voltage electromigration for advanced BEOL copper interconnects | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Jourdain, Anne | |
dc.contributor.imecauthor | Boemmels, Juergen | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2D.6 | |
dc.source.conference | IEEE International Reliability Physics Symposium - IRPS | |
dc.source.conferencedate | 19/04/2015 | |
dc.source.conferencelocation | Monterey, CA USA | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7112685 | |
imec.availability | Published - open access | |