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Broadband metal-insulator-metal capacitors on silicon interposer for low impedance power distribution network

dc.contributor.authorUeda, Nao
dc.contributor.authorRoda Neve, Cesar
dc.contributor.authorDetalle, Mikael
dc.contributor.authorBeyne, Eric
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorNagata, Makoto
dc.date.accessioned2021-10-22T23:46:46Z
dc.date.available2021-10-22T23:46:46Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26022
dc.sourceIIOimport
dc.titleBroadband metal-insulator-metal capacitors on silicon interposer for low impedance power distribution network
dc.typeMeeting abstract
dc.contributor.imecauthorDetalle, Mikael
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.source.peerreviewyes
dc.source.conferenceDATE Workshop: 3D Integration Technology, Architecture, Design, Package, Automation, and Test
dc.source.conferencedate13/03/2015
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


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