Experimental validation of novel EUV mask technology to reduce mask 3D effects

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Author(s)

Van Look, Lieve

;

Philipsen, Vicky

;

Hendrickx, Eric

;

Davydova, Natalia

;

Wittebrood, Friso

;

De Kruif, Robert

;

Van Oosten, Anton

;

Miyazaki, Junji

;

Fliervoet, Timon

;

Van Schoot, Jan

;

Neumann, Jens Timo

Metrics

1930 since deposited on 2021-10-23

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Acq. date: 2025-10-24