Experimental validation of novel EUV mask technology to reduce mask 3D effects

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Authors
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo
Conference
31st European Mask and Lithography Conference
Title
Experimental validation of novel EUV mask technology to reduce mask 3D effects
Publication type
Proceedings paper
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