Publication:

Experimental validation of novel EUV mask technology to reduce mask 3D effects

Date

2015

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Van Look, Lieve

;

Philipsen, Vicky

;

Hendrickx, Eric

;

Davydova, Natalia

;

Wittebrood, Friso

;

De Kruif, Robert

;

Van Oosten, Anton

;

Miyazaki, Junji

;

Fliervoet, Timon

;

Van Schoot, Jan

;

Neumann, Jens Timo

Statistics

1932 since deposited on 2021-10-23

1last month

Acq. date: 2026-02-25