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Advanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations

dc.contributor.authorVanstreels, Kris
dc.contributor.authorCherman, Vladimir
dc.contributor.authorGonzalez, Mario
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-23T00:28:13Z
dc.date.available2021-10-23T00:28:13Z
dc.date.issued2015
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26111
dc.sourceIIOimport
dc.titleAdvanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.source.peerreviewyes
dc.source.beginpage54
dc.source.endpage58
dc.source.journalMicroelectronic Engineering
dc.source.issue2015
dc.source.volume137
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931714004468
imec.availabilityPublished - imec


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