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Advanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations
Publication:
Advanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations
Date
2015
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanstreels, Kris
;
Cherman, Vladimir
;
Gonzalez, Mario
;
De Wolf, Ingrid
;
Van der Plas, Geert
;
De Vos, Joeri
;
Boemmels, Juergen
;
Tokei, Zsolt
Journal
Microelectronic Engineering
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1902
since deposited on 2021-10-23
Acq. date: 2025-10-27
Citations
Metrics
Views
1902
since deposited on 2021-10-23
Acq. date: 2025-10-27
Citations