Advanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations

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Authors

Vanstreels, Kris; Cherman, Vladimir; Gonzalez, Mario; De Wolf, Ingrid; Van der Plas, Geert; De Vos, Joeri; Boemmels, Juergen; Tokei, Zsolt

ISSN

0167-9317

Issue

2015

Journal

Microelectronic Engineering

Volume

137

Title

Advanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations

Publication type

Journal article

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