Publication:

Advanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations

Date

2015
Journal article
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dc.contributor.authorVanstreels, Kris
dc.contributor.authorCherman, Vladimir
dc.contributor.authorGonzalez, Mario
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.date.accessioned2021-10-23T00:28:13Z
dc.date.available2021-10-23T00:28:13Z
dc.date.issued2015
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26111
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931714004468
dc.source.beginpage54
dc.source.endpage58
dc.source.issue2015
dc.source.journalMicroelectronic Engineering
dc.source.volume137
dc.title

Advanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations

dc.typeJournal article
dspace.entity.typePublication
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