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Determination of the model for the chemical structure of porous PECVD low-k films

dc.contributor.authorVerdonck, Patrick
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorDevonport, Joshua
dc.contributor.authorHuanca, Danilo
dc.contributor.authorGomes dos Santos Filho, Sebastiao
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-23T00:35:04Z
dc.date.available2021-10-23T00:35:04Z
dc.date.issued2015
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26125
dc.sourceIIOimport
dc.titleDetermination of the model for the chemical structure of porous PECVD low-k films
dc.typeJournal article
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpageN3140
dc.source.endpageN3145
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume4
dc.identifier.urlhttp://jss.ecsdl.org/content/4/1/N3140.abstract
imec.availabilityPublished - imec


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