Publication:
Looking Inside MEMS Packages: Investigation of the Hermeticity of MEMS thin Film Packages
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1957 since deposited on 2021-10-23
1last month
Acq. date: 2026-08-20
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Statistics
Views
1957 since deposited on 2021-10-23
1last month
Acq. date: 2026-08-20
Citations