Thermal etching of metal thin films using supercritical fluid
dc.contributor.author | Watanabe, M. | |
dc.contributor.author | Nakamura, Y. | |
dc.contributor.author | Kondoh, E. | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-23T00:55:54Z | |
dc.date.available | 2021-10-23T00:55:54Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26167 | |
dc.source | IIOimport | |
dc.title | Thermal etching of metal thin films using supercritical fluid | |
dc.type | Meeting abstract | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | n/a | |
dc.source.conference | Plasma Etch and Strip in Microtechnology - PESM | |
dc.source.conferencedate | 27/04/2015 | |
dc.source.conferencelocation | Leuven Belgium | |
dc.identifier.url | http://pesm-conference.org/files/2015_abstractbook.pdf | |
imec.availability | Published - open access |