Chemistry of the silicon oxide surface: adsorption from SC1 solutions

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Authors
Hall, L.; Sees, J.; Hurd, Trace; Schmidt, B.; Bellay, L.; Loewenstein, Lee; Mertens, Paul
Conference
4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
Title
Chemistry of the silicon oxide surface: adsorption from SC1 solutions
Publication type
Oral presentation
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