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Impact of BCP asymmetry on DSA patterning performance

dc.contributor.authorWilliamson, Lance
dc.contributor.authorKim, JiHoon
dc.contributor.authorCao, Yi
dc.contributor.authorLin, Guanyang
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-23T01:01:25Z
dc.date.available2021-10-23T01:01:25Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26178
dc.sourceIIOimport
dc.titleImpact of BCP asymmetry on DSA patterning performance
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage943215
dc.source.conferenceAlternative Lithographic Technologies VII
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210769
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9432


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