Publication:

Experimental verification of phase induced mask 3D effects in EUV imaging

Date

2015

Proceedings Paper

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Author(s)

Wittebrood, Friso

;

de Winter, Laurens

;

;

Van Look, Lieve

;

Philipsen, Vicky

;

;

Schiffelers, Guido

;

Hendrickx, Eric

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1920 since deposited on 2021-10-23

Acq. date: 2026-05-18