Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance

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Author(s)

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Dhayalan, Sathish Kumar

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Hikavyy, Andriy

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Holsteyns, Frank

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De Gendt, Stefan

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Yoshida, Yukifumi

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1970 since deposited on 2021-10-23

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Acq. date: 2025-10-25