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Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis

dc.contributor.authorHantschel, Thomas
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorStephenson, Robert
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T12:08:08Z
dc.date.available2021-09-30T12:08:08Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2619
dc.sourceIIOimport
dc.titleFabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage92
dc.source.endpage103
dc.source.conferenceMaterials and Device Characterization in Micromachining
dc.source.conferencedate21/09/1998
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3512


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