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The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance

dc.contributor.authorXue, Panpan
dc.contributor.authorZheng, Huifeng
dc.contributor.authorLi, Weiyi
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorNishi, Yoshio
dc.contributor.authorShohet, J.Leon
dc.date.accessioned2021-10-23T01:18:24Z
dc.date.available2021-10-23T01:18:24Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26210
dc.sourceIIOimport
dc.titleThe effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorAfanasiev, Valeri
dc.source.peerreviewyes
dc.source.beginpage177
dc.source.conferenceAVS 62nd International Symposium and Exhibition
dc.source.conferencedate18/10/2015
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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