Publication:

Lateral NWFET optimization for beyond 7nm nodes

Date

2015

Proceedings Paper

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Author(s)

Yakimets, Dmitry

;

;

Raghavan, Praveen

;

;

;

Schuddinck, Pieter

;

Mallik, Arindam

;

Garcia Bardon, Marie

;

Collaert, Nadine

;

Mercha, Abdelkarim

;

Verkest, Diederik

;

;

De Meyer, Kristin

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1918 since deposited on 2021-10-23

Acq. date: 2026-01-12