Lateral NWFET optimization for beyond 7nm nodes

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Authors
Yakimets, Dmitry; Jang, Doyoung; Raghavan, Praveen; Eneman, Geert; Mertens, Hans; Schuddinck, Pieter; Mallik, Arindam; Garcia Bardon, Marie; Collaert, Nadine; Mercha, Abdelkarim; Verkest, Diederik; Thean, Aaron; De Meyer, Kristin
Conference
International Conference on IC Design and Technology - ICICDT
Title
Lateral NWFET optimization for beyond 7nm nodes
Publication type
Proceedings paper
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