Experimental study of sub-DSA resolution assist features (SDRAF)

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Authors
Yi, Linda; Bekaert, Joost; Gronheid, Roel; Vandenberghe, Geert; Nafus, Kathleen; Wong, H.-S. Philip
Conference
Alternative Lithographic Technologies VII
Title
Experimental study of sub-DSA resolution assist features (SDRAF)
Publication type
Proceedings paper
Embargo date
9999-12-31
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