Low-k OSG damage and etching by F atoms at lowered temperatures

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Authors
Zyryanov, S.; Kurchikov, D.; Lopaev, D.; Mankelevich, Y.; Palov, A.; Rakhimova, T.; Voronina, E.; Novikova, N.; Baklanov, Mikhaïl
Conference
22nd International Symposium on Plasma Chemistry - ISPC
Title
Low-k OSG damage and etching by F atoms at lowered temperatures
Publication type
Oral presentation
Embargo date
9999-12-31
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