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Selective depositions enabled by surface functionalization and ALD

dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-23T10:04:49Z
dc.date.available2021-10-23T10:04:49Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26292
dc.sourceIIOimport
dc.titleSelective depositions enabled by surface functionalization and ALD
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpage27
dc.source.endpage27
dc.source.conferenceEMN
dc.source.conferencedate4/09/2016
dc.source.conferencelocationBudapest Hungary
imec.availabilityPublished - imec
imec.internalnotes1 page abstract no limits of words


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