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Study of LER as a function of Si fin etching step in replacement FinFET process (title translated).

dc.contributor.authorBaranov, Gleb
dc.contributor.authorMilenin, Alexey
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-23T10:05:31Z
dc.date.available2021-10-23T10:05:31Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26311
dc.sourceIIOimport
dc.titleStudy of LER as a function of Si fin etching step in replacement FinFET process (title translated).
dc.typeJournal article
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage6
dc.source.journalMikroelektronika (rus)
dc.source.issue3
dc.source.volume45
imec.availabilityPublished - imec


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