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MEMS R&D in Europe

dc.contributor.authorHermans, Lou
dc.date.accessioned2021-09-30T12:11:02Z
dc.date.available2021-09-30T12:11:02Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2631
dc.sourceIIOimport
dc.titleMEMS R&D in Europe
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1
dc.source.endpage16
dc.source.conferenceTribology Issues and Opportunities in MEMS; Proceedings of the NSF/AFOSR/ASME Workshop
dc.source.conferencedate9/11/1997
dc.source.conferencelocationColumbus, OH USA
imec.availabilityPublished - open access


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