Authors

Birmpiliotis, Dimitrios; Czarnecki, Piotr; Koutsoureli, Matroni; Papaioannou, George; De Wolf, Ingrid

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

159

Title

Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film

Publication type

Journal article