Publication:
Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film
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1890 since deposited on 2021-10-23
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Acq. date: 2026-08-06
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Statistics
Views
1890 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-08-06
Citations