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Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film

dc.contributor.authorBirmpiliotis, Dimitrios
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorKoutsoureli, Matroni
dc.contributor.authorPapaioannou, George
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-23T10:07:33Z
dc.date.available2021-10-23T10:07:33Z
dc.date.issued2016
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26346
dc.sourceIIOimport
dc.titleAssessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film
dc.typeJournal article
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage209
dc.source.endpage214
dc.source.journalMicroelectronic Engineering
dc.source.volume159
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931716302003
imec.availabilityPublished - imec


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