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Junctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND Flash

dc.contributor.authorBlomme, Pieter
dc.contributor.authorVersluijs, Janko
dc.contributor.authorErcken, Monique
dc.contributor.authorSouriau, Laurent
dc.contributor.authorHody, Hubert
dc.contributor.authorVecchio, Emma
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorTan, Chi Lim
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-23T10:08:13Z
dc.date.available2021-10-23T10:08:13Z
dc.date.issued2016-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26355
dc.sourceIIOimport
dc.titleJunctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND Flash
dc.typeProceedings paper
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorHody, Hubert
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.beginpage113
dc.source.endpage116
dc.source.conferenceInternational Memory Workshop - IMW
dc.source.conferencedate15/05/2016
dc.source.conferencelocationParis France
imec.availabilityPublished - imec


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