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Templated DSA with EUV-exposed pre-patterns

dc.contributor.authorBoeckx, Carolien
dc.contributor.authorDoise, Jan
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-23T10:08:31Z
dc.date.available2021-10-23T10:08:31Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26359
dc.sourceIIOimport
dc.titleTemplated DSA with EUV-exposed pre-patterns
dc.typeProceedings paper
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceChemical Research in Flanders
dc.source.conferencedate24/10/2016
dc.source.conferencelocationBlankenberge Belgium
imec.availabilityPublished - imec


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