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(Non-hemispherical) apex shape formation and (non-uniform) apex temperature distribution during laser-assisted atomprobe tomography of semiconductors
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Authors
Bogdanowicz, Janusz
;
Kumar, Arul
;
Melkonyan, Davit
;
Arnoldi, Laurent
;
Fleischmann, Claudia
;
Morris, Richard
;
Vella, Angela
;
Gilbert, Matthieu
;
Jonathan, Houard
;
Vandervorst, Wilfried
Conference
Atom Probe Tomography & Microscopy
Title
(Non-hemispherical) apex shape formation and (non-uniform) apex temperature distribution during laser-assisted atomprobe tomography of semiconductors
Publication type
Proceedings paper
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