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Atomic force microscopy in the era of 3D nanoelectronic devices

dc.contributor.authorCelano, Umberto
dc.date.accessioned2021-10-23T10:12:48Z
dc.date.available2021-10-23T10:12:48Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26403
dc.sourceIIOimport
dc.titleAtomic force microscopy in the era of 3D nanoelectronic devices
dc.typeProceedings paper
dc.contributor.imecauthorCelano, Umberto
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.source.peerreviewno
dc.source.conferenceNanoinnovation 2016
dc.source.conferencedate20/09/2016
dc.source.conferencelocationRoma Italy
imec.availabilityPublished - imec


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