Authors

Celano, Umberto; Capogreco, Elena; Lisoni, Judit; Arreghini, Antonio; Kunert, Bernardette; Guo, Weiming; Van den Bosch, Geert; Van Houdt, Jan; De Meyer, Kristin; Furnemont, Arnaud; Vandervorst, Wilfried

Conference

IEEE Symposium on VLSI Technology

Title

Direct three-dimensional observation of the conduction in poly-Si and In1-xGaxAs 3D NAND vertical channels

Publication type

Proceedings paper

Embargo date

9999-12-31