dc.contributor.author | Chan, BT | |
dc.contributor.author | Sayan, Safak | |
dc.contributor.author | Marzook, Taisir | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.contributor.author | Gronheid, Roel | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Piumi, Daniele | |
dc.date.accessioned | 2021-10-23T10:14:14Z | |
dc.date.available | 2021-10-23T10:14:14Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26416 | |
dc.source | IIOimport | |
dc.title | Etch challenges for chemo-expitaxy Directed Self-Assembly (DSA) LiNe flow in Fin patterning | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Chan, BT | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Piumi, Daniele | |
dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.conference | Plasma Etch and Strip in Microtechnology - PESM | |
dc.source.conferencedate | 9/05/2016 | |
dc.source.conferencelocation | Grenoble France | |
imec.availability | Published - open access | |