dc.contributor.author | Chan, BT | |
dc.contributor.author | Singh, Arjun | |
dc.contributor.author | Luong, Vinh | |
dc.contributor.author | Parnell, Doni | |
dc.contributor.author | Yamashita, Fumiko | |
dc.contributor.author | Gronheid, Roel | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Piumi, Daniele | |
dc.date.accessioned | 2021-10-23T10:14:22Z | |
dc.date.available | 2021-10-23T10:14:22Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26417 | |
dc.source | IIOimport | |
dc.title | Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Chan, BT | |
dc.contributor.imecauthor | Singh, Arjun | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Piumi, Daniele | |
dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
dc.source.peerreview | yes | |
dc.source.conference | 42nd Micro- and Nano-Engineering - MNE | |
dc.source.conferencedate | 19/09/2016 | |
dc.source.conferencelocation | Vienna Austria | |
imec.availability | Published - imec | |