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Towards high performance sub-10nm finW bulk FinFET technology

dc.contributor.authorChiarella, Thomas
dc.contributor.authorKubicek, Stefan
dc.contributor.authorRosseel, Erik
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorEyben, Pierre
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorKim, Min-Soo
dc.contributor.authorChew, Soon Aik
dc.contributor.authorSchram, Tom
dc.contributor.authorDemuynck, Steven
dc.contributor.authorCupak, Miroslav
dc.contributor.authorRynders, Luc
dc.contributor.authorDehan, Morin
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorMitard, Jerome
dc.contributor.authorMocuta, Dan
dc.contributor.authorMocuta, Anda
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-23T10:18:08Z
dc.date.available2021-10-23T10:18:08Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26446
dc.sourceIIOimport
dc.titleTowards high performance sub-10nm finW bulk FinFET technology
dc.typeProceedings paper
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorCupak, Miroslav
dc.contributor.imecauthorRynders, Luc
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage131
dc.source.endpage134
dc.source.conference46th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate12/09/2016
dc.source.conferencelocationLausanne Switzerland
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7599605/
imec.availabilityPublished - open access


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