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Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

dc.contributor.authorChoudhury, F.A.
dc.contributor.authorNguyen, H.M.
dc.contributor.authorBaklanov, M.R.
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorLi, W.
dc.contributor.authorPei, D.
dc.contributor.authorBenjamin, D.I.
dc.contributor.authorZheng, H.
dc.contributor.authorKing, S.W.
dc.contributor.authorLin, Y.H.
dc.contributor.authorFung, H.S.
dc.contributor.authorChen, C.C.
dc.contributor.authorNishi, Y.
dc.contributor.authorShohet, J.L.
dc.date.accessioned2021-10-23T10:18:33Z
dc.date.available2021-10-23T10:18:33Z
dc.date.issued2016
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26449
dc.sourceIIOimport
dc.titleInfluence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation
dc.typeJournal article
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage122902
dc.source.journalApplied Physics Letters
dc.source.issue12
dc.source.volume109
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/109/12/10.1063/1.4962899
imec.availabilityPublished - open access


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