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Challenges in LER/CDU metrology in DSA: placement error and cross-line correlations
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Authors
Constantoudis, Vassilios
;
Kuppuswamy, V.K.M.
;
Gogolides, Evangelos
;
Vaglio Pret, Alessandro
;
Pathangi Sriraman, Hari
;
Gronheid, Roel
Conference
Metrology, Inspection, and Process Control for Microlithography XXX
Title
Challenges in LER/CDU metrology in DSA: placement error and cross-line correlations
Publication type
Proceedings paper
Embargo date
9999-12-31
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