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Overview MX2 deposition by ALD and CVD methods

dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-23T10:31:18Z
dc.date.available2021-10-23T10:31:18Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26529
dc.sourceIIOimport
dc.titleOverview MX2 deposition by ALD and CVD methods
dc.typeOral presentation
dc.contributor.imecauthorDelabie, Annelies
dc.source.peerreviewno
dc.source.conference2Dfun Workshop
dc.source.conferencedate14/10/2016
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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