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Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning

dc.contributor.authorJeon, J. S.
dc.contributor.authorOgle, B.
dc.contributor.authorBaeyens, Martien
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-09-30T12:16:36Z
dc.date.available2021-09-30T12:16:36Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2652
dc.sourceIIOimport
dc.titleEvaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
dc.typeOral presentation
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewno
dc.source.conference4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate21/09/1998
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - imec
imec.internalnotesPubl. in 1999; Zie C3501


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