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Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides
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Authors
Delabie, Annelies
;
Groven, Benjamin
;
Heyne, Markus
;
Zhang, Haodong
;
Tomczak, Yoann
;
Caymax, Matty
;
Radu, Iuliana
Conference
Workshop on Atomic Layer Deposition for 2D Materials
Title
Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides
Publication type
Oral presentation
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