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Large gas clusters for damageless molecular depth-profiling:

dc.contributor.authorDelcorte, Arnaud
dc.contributor.authorCristaudo, Vanina
dc.contributor.authorEdwards, Ryan
dc.contributor.authorPospisilova, Eva
dc.contributor.authorSurana, Supriya
dc.date.accessioned2021-10-23T10:31:49Z
dc.date.available2021-10-23T10:31:49Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26532
dc.sourceIIOimport
dc.titleLarge gas clusters for damageless molecular depth-profiling:
dc.typeOral presentation
dc.contributor.imecauthorCristaudo, Vanina
dc.source.peerreviewno
dc.source.conference7ème Conférence Francophone sur les Spectroscopies d'Electrons - ELSPEC
dc.source.conferencedate22/05/2016
dc.source.conferencelocationVersailles France
imec.availabilityPublished - imec


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