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Template assisted synthesis of porous metal oxide and metal nanostructures by ALD
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Authors
Deng, Sharon
;
Kurttepeli, Murt
;
Bals, Sara
;
Cott, Daire
;
Detavernier, Christophe
Conference
230th ECS Fall Meeting: Pacific Rim Meeting - PRiME
Title
Template assisted synthesis of porous metal oxide and metal nanostructures by ALD
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