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Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries

dc.contributor.authorDobbelaere, Thomas
dc.contributor.authorMattelaer, Felix
dc.contributor.authorDendooven, Jolien
dc.contributor.authorVereecken, Philippe
dc.contributor.authorDetavernier, Christophe
dc.date.accessioned2021-10-23T10:38:07Z
dc.date.available2021-10-23T10:38:07Z
dc.date.issued2016
dc.identifier.issn0897-4756
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26565
dc.sourceIIOimport
dc.titlePlasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries
dc.typeJournal article
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.beginpage3435
dc.source.endpage3445
dc.source.journalChemistry of Materials
dc.source.issue10
dc.source.volume28
dc.identifier.urlhttp://pubs.acs.org/doi/abs/10.1021/acs.chemmater.6b00853
imec.availabilityPublished - imec


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