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Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries
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Authors
Dobbelaere, Thomas
;
Mattelaer, Felix
;
Dendooven, Jolien
;
Vereecken, Philippe
;
Detavernier, Christophe
ISSN
0897-4756
Issue
10
Journal
Chemistry of Materials
Volume
28
Title
Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries
Publication type
Journal article
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